Depth Profiling of Perhydoropolysilazane Thin Film Using Multi Anode XPS Technique
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Surface Analysis
سال: 2009
ISSN: 1341-1756,1347-8400
DOI: 10.1384/jsa.15.309